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Subject Started by Replies Views Last post
Design of MEMS based MIcroresonator leondante 0 108 Last post July 26, 2010, 11:16:19 AM
by leondante
hollow trenches with porous silicon vineeth.reddy 0 282 Last post May 17, 2010, 06:27:08 AM
by vineeth.reddy
Wet Etch Recipes kruglick 3 4930 Last post August 07, 2009, 08:55:37 PM
by joshaby
Plasma Deposition recipes MEMS Tool 0 1306 Last post May 30, 2007, 10:02:18 PM
by MEMS Tool
Plasma Etching Recipes MEMS Tool 0 1253 Last post May 30, 2007, 05:52:24 PM
by MEMS Tool
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